News Article
SEMI and SST announce 2014 "Best of West" award finalists
Each year at SEMICON West, the "Best of West" awards are presented by Solid State Technology (SST) and SEMI. The award was established to recognise contributors moving the industry forward with their technological developments in the microelectronics supply chain. The 2014 Best of West Finalists are: Microtronic: EAGLEview IV - EAGLEview IV is an automated macro defect wafer inspection system that provides over 3,000 wafer throughput per day, defect detection accuracy, and wafer classification. EAGLEview IV resolves many of the problems of manual/micro wafer inspection by automating and standardising wafer inspection. South Hall, Booth #729 (Category: Metrology and Test) Nikon Corporation: NSR-S630D Immersion Scanner - The NSR-S630D ArF immersion scanner leverages the well-known Streamlign platform, incorporating further developments in stage, optics, and autofocus technology to deliver mix-and-match overlay and focus control with sustained stability to enable the 10/7 nm node. South Hall, Booth #1705 (Category: Wafer Processing Equipment) SPTS Technologies: Rapier XE - Rapier XE is a new, 300mm, plasma etch module which can lower costs and increase yields for device manufacturers utilising TSVs for 3D packaging. Designed for via reveal applications, the new module offers blanket silicon etch rates typically 3 to 4 times faster than competing systems. South Hall, Booth #1317 (Category: Wafer Processing Equipment) The Best of West Award winner will be announced during SEMICON West on Wednesday, July 9th, 2014.
